| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd29c72cc995cfe3179f2777987f63b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f41bdb80c75e0c530ce2668fcfaaa946 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 |
| filingDate |
2002-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_077ada8f35c7cf04b7d85c6fe6d9d7ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7505ad4cc920cde0ea257eebf4d5f325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cd52eaa5821ac1df0e81571548994b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70f674126f90eaf5fe43b31664a5f80e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_064571445310836e4fe852534a10d42d |
| publicationDate |
2004-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004161665-A |
| titleOfInvention |
Raw material solution for forming multi-component metal oxide thin film, thin film forming method using the raw material solution, and thin film formed by the method |
| abstract |
The present invention provides a thin film and a raw material solution for film formation, which are excellent in solubility of raw materials and storage stability of a solution, are homogeneous, and have excellent electric and mechanical properties by a liquid phase method. At least one kind of organic metal salt containing at least a partial hydrolyzate and / or partial polycondensate of a hydrolyzable organic Zr compound or a metal selected from Group 2 and Group 3 is combined with a hydrolyzable organic Zr compound. A partially hydrolyzable and / or partially polycondensate of a hydrolyzable organic Zr compound containing a metal selected from Group 2 and Group 3 formed by a condensation reaction of the Zr compound, and wherein the partial hydrolysis and / or This is a film-forming raw material solution containing a complex of the partially polycondensed organometallic compound and a hydrophobic organic solvent having a multiple bond. A raw material solution using a carboxylic acid having a neutralization value of 250 or more and less than 500 and a π electron formed by a multiple bond as a ligand has excellent storage stability, and the ligand is easily removed during drying and calcining. And low temperature firing is possible. [Selection diagram] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7232405-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102412785-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021004269-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170074966-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111420670-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111420670-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014017490-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106902651-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006346621-A |
| priorityDate |
2002-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |