http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004152992-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d97cb748898aa080b013f7f35bc8b434 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-416 |
| filingDate | 2002-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba3808c41df5c07cb590dbc76633f9ea |
| publicationDate | 2004-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004152992-A |
| titleOfInvention | Liquid evaluation device |
| abstract | In particular, the present invention provides an apparatus for quickly and easily evaluating a cleaning property, an etching property, and the like of a liquid in contact with a silicon wafer, for example, ultrapure water, a cleaning solution, or the like. A liquid evaluation device includes, as main components, a silicon single crystal electrode, a reference electrode, and a device for measuring a potential generated between the electrodes when the electrodes are immersed in a sample liquid. [Selection diagram] None |
| priorityDate | 2002-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.