| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2002-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73f447e427e142b0614cd9ae99816738
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da7a5e710a365e31ce7f5bae9f3287d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_853861c0b322e06c4a82d380374b3c87 |
| publicationDate |
2004-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004145050-A |
| titleOfInvention |
Method of forming fine pattern |
| abstract |
Provided is a method for forming a fine pattern, which improves the applicability and film thickness uniformity of a coating forming agent and reduces the amount of the coating forming agent used in an ultra-fine processing process using the coating forming agent. After a substrate having a photoresist pattern is subjected to a hydrophilic treatment, a step of applying a coating forming agent for pattern miniaturization on the substrate, heat-treating the coating forming agent by heat treatment, and utilizing the heat shrinkage effect thereof. A method for forming a fine pattern, comprising: a step of narrowing an interval between photoresist patterns by removing the coating forming agent. [Selection diagram] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013015075-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985529-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009008265-A1 |
| priorityDate |
2002-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |