| abstract |
An object of the present invention is to provide a peeling method which can be easily peeled irrespective of characteristics, conditions, and the like of an object to be peeled, and in particular, can be transferred to various transfer members. In a method of transferring a thin film device, in which a transfer layer including a thin film device formed on a substrate via a separation layer is separated from the substrate and transferred to a transfer body, the transfer layer includes Arranging the transfer body on the opposite side, and causing separation in the layer and / or interface of the separation layer, separating the transferred layer from the substrate, and transferring the transferred layer to the transfer body. By performing the transfer a plurality of times, the front and back surfaces of the transfer-receiving layer are made the same as when the transfer layer is formed on the substrate. [Selection diagram] FIG. |