http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004138790-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 2002-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abf92c6162f276a54a5782dd87f205c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_601ba4a71019c4ad5d4dff3748ba6624 |
publicationDate | 2004-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2004138790-A |
titleOfInvention | Positive resist composition |
abstract | A positive resist composition having few development defects such as bridging, high temporal stability after coating (PCD), large temporal stability after exposure (PED), and excellent positive processing margin. A resist composition is provided. (A) A specific repeating unit having —COOH, —OH or —C (═O) CH 2 C (═O) R 4 (R 4 is a hydrocarbon) in the side chain, and an alicyclic ring in the side chain A resin containing a specific acid-decomposable repeating unit having a structure and a specific repeating unit having an alicyclic structure having a hydroxyl group in a side chain, the dissolution rate of which is increased in an alkaline developer by the action of an acid, (B) activity A positive resist composition comprising a sulfonium compound that does not have an aromatic ring and generates an acid upon irradiation with light or radiation, and (C) a solvent. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4493012-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006038387-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006016520-A |
priorityDate | 2002-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 359.