http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004134677-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9019c0ce5cb7b82c85e121f6cac86dce |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2002-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc39471fa013cf026a98493067c868b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_230c2ae345469f49f0d136d4429ec29b |
| publicationDate | 2004-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004134677-A |
| titleOfInvention | Method of changing material phase by light irradiation, method of manufacturing tunnel barrier type magnetoresistive element using the method, and method of metal wiring |
| abstract | A method for changing a material phase from a metal phase to an insulating phase, or from an insulating phase to a metal phase, or from a ferromagnetic phase to a non-ferromagnetic phase, or from a non-ferromagnetic phase to a ferromagnetic phase, is provided. A method of manufacturing a tunnel barrier type oxide magnetoresistive element and a metal wiring method using this method at low cost and high yield are provided. A film 1 is formed of a substance having a chemical composition of a substance which changes from a metal phase to an insulator phase according to a chemical composition, and the chemical composition of the substance is changed to an insulating phase. The phase 1 is changed to the metal phase 5 by irradiating light 3 having a desired wavelength. Conversely, a film 2 of a substance having a chemical composition of a metal phase whose chemical composition changes from a metal phase to an insulator phase depending on the chemical composition is formed, and only the metal phase of the substance is excited in the film 2. The phase 2 is changed to the insulating phase 6 by irradiating light 4 having a wavelength. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7132130-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019519919-A |
| priorityDate | 2002-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.