http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004132973-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-73 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-00 |
| filingDate | 2003-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49c91923da5313460ca661653926151e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f5c0e61da564a5977d8b46c2cc5433c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b78166ce3e6763b5f0f4e4958389fbf |
| publicationDate | 2004-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004132973-A |
| titleOfInvention | Liquid organic metal compound vaporizer |
| abstract | SOLUTION: A liquid raw material container containing a liquid organometallic compound MO, a vaporizer for vaporizing the MO, a liquid mass flow controller MFC for connecting the container and the vaporizer and controlling the flow rate of the MO are interposed. A liquid source path mounted thereon, a carrier gas source, connecting the vapor source to the carrier gas source, a carrier gas path in which a carrier gas MFC is interposed, and one end connected to a gas outlet path of the vaporizer, The other end is connected to a sample inlet of an inductively coupled plasma emission spectrometer, and a sample gas path in which an in-line monitor is interposed, a gas cylinder filled with a calibration standard gas, and an in-line of this and the sample gas path. A vaporizer having a standard gas path in which a standard gas MFC for controlling the flow rate of the calibration standard gas is connected by connecting the required portion downstream of the monitor interposition position. Feeding device. The vaporization supply device of the present invention can always introduce an organic metal compound gas having an accurate concentration into an ICP device. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101341762-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012093320-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7957003-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101006175-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010181359-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100816818-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007097211-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007218816-A |
| priorityDate | 2002-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.