| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2003-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95140663037e19701eae26904751e23b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ec56380109a9c36703324b97bada4e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_089bc66918c1a60a9ac390ddcbaf520d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce8802c55e1a71d6a54245b5db27a338 |
| publicationDate |
2004-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004128511-A |
| titleOfInvention |
Cerium oxide abrasive, semiconductor chip and semiconductor device, their manufacturing method, and substrate polishing method |
| abstract |
An insulating film of an organic SOG film or an organic polymer resin film which can be globally planarized, has good embedding between fine wirings, and has a low dielectric constant is polished. An abrasive containing a slurry in which the following cerium oxide particles are dispersed in water. (1) Cerium oxide particles obtained by adding hydrogen peroxide to a cerium carbonate dispersed aqueous solution. (2) Cerium oxide particles obtained by oxidizing a precipitate obtained by adding ammonium hydrogen carbonate to an aqueous cerium nitrate solution with hydrogen peroxide. (3) Cerium oxide particles obtained by making an aqueous solution of cerium ammonium nitrate neutral or alkaline. [Selection diagram] Fig. 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009290188-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115368826-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015187069-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014058422-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018179062-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115368826-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114933301-A |
| priorityDate |
1996-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |