http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004128055-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G69-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate | 2002-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d983894527b61ee5ce8b1b3026cd67ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02428b9bfd887449ff8c255edd5470ba |
publicationDate | 2004-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2004128055-A |
titleOfInvention | Insulating film and semiconductor device |
abstract | An insulating film material excellent in electric characteristics, thermal characteristics, mechanical characteristics, and the like and capable of reducing the dielectric constant, a coating varnish for an insulating film including the same, an insulating film and a semiconductor device using the same are provided. A material for an insulating film containing, as a film-forming component, a mixture of a polyamide having a specific structure and an oligomer, or a copolymer obtained by reacting a polyamide having a specific structure with a reactive oligomer. A coating varnish for an insulating film containing this material and an organic solvent, an insulating film comprising a resin layer having polybenzoxazole as a main structure obtained by subjecting these materials to a heat treatment to cause a condensation reaction and a crosslinking reaction, and having fine pores And a semiconductor device having an interlayer insulating film for multilayer wiring and / or a surface protective layer comprising the insulating film. [Selection diagram] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010085607-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111384021-A |
priorityDate | 2002-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 524.