http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004126605-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2003-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbedb1a5039de4a4d2212c916ad759ca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d7553b249b3632974346bc3d101edca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b371d878503af0da2b50566aef90ca7d |
| publicationDate | 2004-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004126605-A |
| titleOfInvention | Method of forming resist pattern |
| abstract | PROBLEM TO BE SOLVED: To provide a chemical amplification which has high transparency to an ArF excimer laser, has excellent sensitivity, resist pattern shape, dry etching resistance and adhesion, has a high affinity for alkali, and can give a good resist pattern by paddle development. The present invention provides a method for forming a resist pattern using a photoresist composition. SOLUTION: When a photoresist composition is coated on a substrate and dried to form a resist layer, when a positive resist pattern is formed by performing selective irradiation of excimer laser, heating after exposure and alkali development, In the above photoresist composition, at least a part of the structural unit (A) has a general formula: (R 1 is a hydrogen atom or a methyl group) A chemically amplified photoresist composition containing an acrylic acid or methacrylic acid ester copolymer having the structural unit represented by the formula (B), an acid generator (B) and a solvent (C) is used. [Selection diagram] None |
| priorityDate | 2003-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 147.