| abstract |
PROBLEM TO BE SOLVED: To provide a probe card which has excellent mechanical strength at normal temperature and high temperature, does not cause poor contact with a probe, warping, deformation, etc. even at high temperature, and quickly follows temperature rise / fall of a silicon wafer. To provide. A probe card used for testing an integrated circuit formed on a semiconductor wafer, comprising a ceramic substrate made of non-oxide ceramic. [Selection] Fig. 2 |