abstract |
[PROBLEMS] When analyzing metal impurities in a chemical solution and pure water, contamination from an environmental atmosphere or a jig can be prevented, and high cleanliness can be easily achieved and maintained. Provision of an analysis method that enables high-sensitivity, high-precision analysis that can be preprocessed with simple steps to specifications. SOLUTION: A high-purity gas is used in an air flow in a closed container, a clean concentrating jig is placed horizontally therein, a chemical solution to be analyzed is dropped on the surface of the jig, and dried under reduced pressure so as not to cause bumping. By doing so, pretreatment can be easily performed, and the required decomposition and concentration specifications can be met. [Selection diagram] Fig. 1 |