http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004107182-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421f6f8fd79c2632ebff77c570dce2e8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82cbc291d77c061ac9a216f86ec010a3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14 |
| filingDate | 2002-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_138af86ac790d16201c8b03263e93f3c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c26e388b9cc06eb658747c274527429 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13ec06dbae962c59d5b58fe7ca17efe5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ef882d40b9ec0add24116106e511b76 |
| publicationDate | 2004-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004107182-A |
| titleOfInvention | Film forming method and film forming apparatus |
| abstract | A film forming method and a film forming apparatus capable of efficiently forming a uniform film at a predetermined position using a laser are provided. The film forming method includes irradiating a substrate surface with a laser beam while introducing a raw material component containing a gaseous substance in the direction of the substrate, and heating the substrate and simultaneously reacting the raw material component to form a film made of a reaction product on the substrate. Is formed on the surface of the substrate. Preferably, the raw material components are introduced perpendicularly to the substrate. The film forming apparatus includes a material introducing means including a vaporizer, a film forming chamber in which a raw material component is introduced from the raw material introducing means, and a substrate is provided therein, a laser provided in the film forming chamber and applying a laser to the substrate. A laser generator for irradiation. [Selection diagram] Fig. 1 |
| priorityDate | 2002-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.