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filingDate 2002-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2004096052-A
titleOfInvention Semiconductor device, method of manufacturing the same, and metal wiring
abstract An object of the present invention is to improve the yield of a semiconductor device including a copper-containing metal wiring. A copper silicide is formed on a first copper wiring made of copper-containing metal, and a connection plug made of copper-containing metal and a second copper wiring made of copper-containing metal are provided. Is formed between them. [Selection] Fig. 2
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