http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004048033-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd83260a96356882b5f50dd097411a72 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2003-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88aea8271f897c42817cc8fca22da2db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0da46784561a31e772e95a0226ade17 |
| publicationDate | 2004-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004048033-A |
| titleOfInvention | Metal wiring formation method |
| abstract | PROBLEM TO BE SOLVED: To provide a metal wiring forming method capable of suppressing the adhesion of a polishing product to a polishing pad and forming a uniform wiring layer with high throughput even when a large amount of copper-based metal is polished in a polishing step. . SOLUTION: A step of forming a concave portion in an insulating film 1 formed on a substrate, a step of forming a copper-based metal film 2 on the entire surface so as to fill the concave portion, In a method for forming a metal wiring having a step of polishing by a polishing method, the polishing step uses a chemical mechanical polishing slurry containing an abrasive, an oxidizing agent and citric acid, and applies a polishing pad with a pressure of 27 kPa or more to a polishing surface. Are brought into contact with each other to perform polishing. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018216445-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018200938-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8877644-B2 |
| priorityDate | 2003-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 119.