| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-135 |
| filingDate |
2002-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f44a11946c40c0d75041932d39ac51d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e337952693deb28866e4e5973155ada8 |
| publicationDate |
2004-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004047814-A |
| titleOfInvention |
Piezoelectric element and method of manufacturing the same |
| abstract |
Provided is a piezoelectric element which can obtain high insulating properties and sufficient piezoelectric characteristics even when thinned, and can increase the density of a liquid discharge head. A piezoelectric precursor film is formed in a predetermined shape on a lower electrode, and the patterned piezoelectric precursor film is crystallized to obtain a piezoelectric thin film. This makes it possible to obtain a piezoelectric film having crystal grains with a cross-sectional circumference of 2000 nm or more and a crystal grain density of 4 × 10 9 [pieces / m 2 ] or less. [Selection diagram] Fig. 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010274620-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012196827-A |
| priorityDate |
2002-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |