http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004037571-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-6565 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2002-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_853861c0b322e06c4a82d380374b3c87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73f447e427e142b0614cd9ae99816738 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da7a5e710a365e31ce7f5bae9f3287d6 |
| publicationDate | 2004-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004037571-A |
| titleOfInvention | Coating forming agent for pattern refinement and method for forming fine pattern using the same |
| abstract | [PROBLEMS] To miniaturize a pattern using a coating forming agent, to significantly improve the heat shrinkage of the coating forming agent during heat treatment, and to obtain a fine pattern having a good profile and characteristics required in a current semiconductor device. And a method for forming a fine pattern using the same. A coating forming agent which is coated on a substrate having a photoresist pattern and which is used to form a fine pattern by narrowing a distance between the photoresist patterns by utilizing a heat shrinkage effect thereof, comprising at least (meth) A coating forming agent for pattern miniaturization, comprising a water-soluble polymer containing acrylamide as a constituent monomer, and a method for forming a fine pattern using the coating forming agent. [Selection diagram] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4583860-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006106295-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100709442-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012155304-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013133471-A |
| priorityDate | 2002-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 159.