http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004029535-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
filingDate | 2002-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f75a4961987e98983d016f153ebd1df4 |
publicationDate | 2004-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2004029535-A |
titleOfInvention | Radiation-sensitive resin composition |
abstract | The present invention provides a radiation-sensitive resin composition capable of forming a transparent film having no visible coloring, high transmittance to visible light, sufficient solvent resistance, and high radiation sensitivity. (A) A composition comprising (a1) a structural unit derived from an unsaturated carboxylic acid and (a2) a structural unit derived from an unsaturated compound having an oxetanyl group (but not having an unsaturated carboxylic acid). Polymer, (B) a quinonediazide compound, (C) A radiation-sensitive resin composition comprising a sulfonic acid ester of N-hydroxysuccinimide represented by the general formula (1). (In the formula, R represents an optionally substituted alkyl group having 1 to 20 carbon atoms or an optionally substituted aryl group having 6 to 20 carbon atoms.) [Selection diagram] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4586703-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006139265-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I410667-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007101763-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011017798-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4677871-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2639638-A1 |
priorityDate | 2002-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 193.