http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004022382-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-06 |
| filingDate | 2002-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28ae0f1c7a817124b57dfbcd41fdf81c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b44bcfb6e469a822c1d082f135ea0adc |
| publicationDate | 2004-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004022382-A |
| titleOfInvention | Ceramic susceptor mounting structure, ceramic susceptor support structure, ceramic susceptor support member, method of forming ceramic susceptor support structure, and pressing jig |
| abstract | Provided is a ceramic susceptor mounting structure that can reduce a thermal stress at a joint between a ceramic susceptor and a support member, can suppress a joint failure at a joint surface, and hardly cause minute cracks and gas leaks. SOLUTION: A ceramic susceptor 1A to be heated, a ceramic supporting member 3 joined to the back of the ceramic susceptor 1A, and a ceramic susceptor mounting structure including a chamber 9 fixing the supporting member 3 are provided. 13, the support member 3 has a main body portion 3a, a joining surface 5 for the ceramic susceptor 1A, and an end surface 3f opposite to the joining surface 5, and the width D1 of the outer contour of the joining surface 5 is equal to the end surface 3f. And the width E1 of the inner contour of the joint surface 5 is larger than the width E2 of the inner contour of the end face 3f. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101345482-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8294069-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008270197-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007258115-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I426813-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7618494-B2 |
| priorityDate | 2002-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.