Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0385 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-40 |
filingDate |
2003-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1df85eaaecb43cea07de301f902d62d2 |
publicationDate |
2004-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2004021258-A |
titleOfInvention |
Negative resist composition comprising a base polymer containing an epoxy ring and a silicon-containing crosslinking agent, and a method for forming a pattern of a semiconductor device using the same |
abstract |
Provided is a negative resist composition comprising a base polymer containing an epoxy ring and a silicon-containing cross-linking agent, and a method for forming a pattern of a semiconductor device using the same. A negative resist composition comprising an alkali-soluble base polymer substituted by an epoxy ring, a silicon-containing crosslinking agent having a multiple hydroxyl functional group, and a PAG. Therefore, a fine pattern can be formed by a BLR process using a negative resist composition. [Selection] Fig. 2 |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010276880-A |
priorityDate |
2002-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |