| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf334efdc57a817d413aef1d9f5e9d80 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-035 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-0085 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00 |
| filingDate |
2002-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f21edcce0171664c8c10e9acfc76da7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cbbbe480dc0b425c8467376ddfa40b1 |
| publicationDate |
2004-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004009144-A |
| titleOfInvention |
Manufacturing method of micro parts |
| abstract |
In manufacturing a micro component, a lithography apparatus such as a stepper and an etching apparatus is not required to improve economical efficiency, and it is also possible to manufacture a component having a complicated shape which is difficult to manufacture by a lithography technique. A resin base (1) that can be melted using a solvent is formed, a concave part (3) is formed by applying a physical external force to the resin base (1), and a metal is filled in the concave part (3). Is removed by polishing, and the resin base 1 is dissolved using a solvent to manufacture a micro component. [Selection] Fig. 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009066646-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4526556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8216697-B2 |
| priorityDate |
2002-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |