http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004006368-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-06316 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-073 |
| filingDate | 2003-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e12a6264b4ad6ae1452c6160697c8260 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38b0b74cdf792f568792a89316e6e414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bb21d3296ea7a4cb61a23f005bbbeb8 |
| publicationDate | 2004-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004006368-A |
| titleOfInvention | Diffusion supply type electron source, its manufacturing method and electronic application device |
| abstract | [PROBLEMS] To be used in an electron beam application device such as an electron microscope and an electron beam lithography device, has a high electron flow density, operates stably for a long time, is strong against mechanical shock in a manufacturing process, and is short in time. A diffusion-supply type electron source with a high yield at which the manufacturing process is completed is realized. SOLUTION: A needle-shaped single crystal line 1 of a high melting point metal such as W, Mo or Re is joined to the tip of a hairpin type filament 2 of a high melting point metal such as W, Mo or Re, and A metal powder such as Ti, Zr, Hf, Y, Th, Sc, Be, or a compound powder having a work function or electronegativity lower than 1 or a compound powder thereof is slurried with an organic solvent obtained by adding butyl acetate or isoamyl acetate to nitrocellulose. Then, it is applied to the vicinity of the joint between the single crystal wire 1 and the filament 2 and is heated and sintered in a vacuum to obtain a supply source 3. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006312615-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009238443-A |
| priorityDate | 2003-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.