| abstract |
Provided is a method of manufacturing a piezoelectric ceramic which can use an inexpensive metal for an internal electrode without deteriorating piezoelectric characteristics as a piezoelectric ceramic suitable for a multilayer piezoelectric element such as a multilayer actuator element. A Pb A1 [(Zn 1/3 Nb 1/3 ) a1 Ti b1 Zr c1] O 3 or Pb A2 [(Zn 1/3 Nb 1/3 ) a2 (Mg 1/3 Nb 2/3, ) to produce a piezoelectric ceramic containing d2 Ti b2 Zr c2] O 3 as a main component. The starting materials Pb 3 O 4, zirconium oxide having a specific surface area of 20m 2 / g~50m 2 / g, an anatase ratio is 90% titanium oxide having a specific surface area of 10m 2 / g~50m 2 / g Is used. The starting materials are pulverized and mixed to obtain a raw material mixture having a cumulative 90% particle size of 1 μm or less. The degree of mixing of the raw material mixture is increased, the solid phase reaction during pre-firing becomes good, and the main firing temperature is lowered. [Selection diagram] Fig. 1 |