http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003536064-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J4-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J4-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21 |
| filingDate | 2001-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003536064-A |
| titleOfInvention | Low noise spectroscopic ellipsometer |
| abstract | (57) [Summary] A light source (1) for emitting a light beam, a polarizer (2) arranged on the path of the light beam emitted from the light source, and a sample support for receiving the light beam output from the polarizer A body (9), a polarization analyzer (3) that passes the beam reflected by the sample to be analyzed, a beam from the analyzer, and a monochromator (5) and a photodetector (4). The spectroscopic ellipsometer includes a detection assembly provided with the signal processing means (6) for processing a signal output from the detection assembly and including a counter (13). Cooling means (12) keeps the detection assembly at a temperature lower than ambient temperature, thereby minimizing detector noise, so that it is always under minimal photon noise conditions. It can be seen that by minimizing noise from any source (lamp, detector, ambient environment), optimal conditions for ellipsometric measurements are obtained. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011133492-A |
| priorityDate | 2000-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.