| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B2203-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B2230-01 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2001-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2003-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003526936-A |
| titleOfInvention |
Method and apparatus for processing electronic components |
| abstract |
(57) An electronic component (11) treatment apparatus in which an electronic component (11) is exposed to a heated solvent (15) and subsequently exposed to a treatment fluid that has been exposed to ozone. The electronic component (11) is selectively exposed to the heating solvent (15) by exposing the electronic component (11) to the passing layer of the heating solvent. An electronic component processing apparatus having a heated solvent (15) and an ozonated fluid is provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020155721-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020195176-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7977121-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008177540-A |
| priorityDate |
2000-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |