http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003516634-A

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-97
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-1092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-12
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146
filingDate 2000-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2003-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003516634-A
titleOfInvention Manufacturing method of packaged integrated circuit device and packaged integrated circuit device manufactured by the manufacturing method
abstract (57) Abstract: The present invention discloses an apparatus provided with a crystal substrate, comprising: a crystal substrate (102) on which a microstructure (100) is formed; At least one package layer (106) sealed over the microstructure and further defining at least one cavity between the crystalline substrate (102) and at least one package layer (106); ; A method for manufacturing an apparatus having a crystal substrate is also disclosed.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010098337-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018006931-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011506106-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020183822-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011176297-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10601399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015025942-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011107705-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9478503-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008041630-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11493748-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007528120-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014216475-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015103788-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016208287-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007305804-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7981807-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10976538-B2
priorityDate 1999-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06318625-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9948143-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11326366-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10160482-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1098121-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001527700-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23665650
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419584339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449889201
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449160084
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24461
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10176260
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261

Total number of triples: 66.