http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003516538-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-121 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 |
| filingDate | 2000-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003516538-A |
| titleOfInvention | Absolute humidity sensor |
| abstract | (57) [Summary] An absolute humidity sensor for a microwave oven is disclosed. The absolute humidity sensor is formed on a silicon substrate and a substrate, and detects moisture exposed to the atmosphere, and has a humidity sensing element whose resistance changes according to the amount of moisture detected; a humidity sensing element formed on the substrate; A temperature compensating element that compensates for the resistance of the temperature compensating element; and a protective film that covers the temperature compensating element and blocks moisture in the air so that the resistance of the temperature compensating element does not change. The humidity sensing element and the temperature compensating element include an insulating film formed on the substrate; a polyimide humidity sensing film formed on the insulating film to absorb moisture; and electrodes formed below or above the humidity sensing film. The present invention thus constructed is capable of manufacturing a humidity-sensitive absolute humidity sensor using a silicon wafer as a substrate with a ceramic-based humidity sensing material and integrating the sensor using a silicon process, thereby facilitating mass production of the sensor. It is. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9239308-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011065507-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008536108-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011080833-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012046501-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5175974-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2010113711-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012046501-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010113712-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006133191-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010113711-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007248065-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5470512-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5547296-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101710798-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101848424-B1 |
| priorityDate | 1999-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 30.