| abstract |
Apparatus and method for performing a self-cleaning optical measurement United States Patent Application 20070139400 Kind Code: A1 A beam is directed toward a sample and foreign objects are excluded from a peeping optical path adjacent to the sample. A self-cleaning objective lens (100) is disclosed. The self-cleaning objective comprises an optical element (106, 210, 310, 408, 510) and a substantially transparent fluid (104, 213, 326, 512) flowing between the optical element and the sample. , Substantially eliminating foreign matter from at least a portion adjacent to the sample. The optical element and the fluid cooperate to direct the beam toward the sample. By coupling the self-cleaning objective lens to various measurement devices, various characteristics may be measured on a sample having a foreign substance that interferes with a clear optical measurement. Also, relevant steps may be clearly monitored by incorporating or coupling the measurement device to various sample processing systems. |