http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003509591-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-4622 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32596 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-4622 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 |
| filingDate | 2000-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003509591-A |
| titleOfInvention | Apparatus and method for generating a local plasma by microstructure electrode discharge by microwave |
| abstract | (57) Abstract: The present invention is an apparatus for generating plasma by microstructure electrode discharge, particularly for surface treatment, chemical conversion of gas, or light generation. An apparatus (1) is provided, the apparatus (1) having at least one guide structure (11). The device is provided with a microwave generator by which an electromagnetic microwave can be coupled into the guide structure (11) for generating a plasma. Furthermore, the guide structure (11) has at least one locally closely adjacent plasma region (12), which is connected to the gas. The guide structure (11) is preferably a dielectric-filled waveguide (21) or strip conductor arrangement. These strip conductors extend over the dielectric strip plate. The device and the method carried out using the device are particularly suitable for activating or treating the surface of a substrate or for depositing layers. |
| priorityDate | 1999-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.