http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003506680-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0231 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-104 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-015 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-4472 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B17-02 |
| filingDate | 2000-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003506680-A |
| titleOfInvention | Method and apparatus for simultaneously measuring multiple properties of a multilayer film |
| abstract | (57) [Summary] The present invention relates to a method and an apparatus for simultaneously measuring a number of properties of a sample comprising a multilayer film. This measurement is represented by several steps. First, at least one excitation radiation source illuminates the surface of the sample to excite an acoustic mode. A probe source of radiation illuminates an acoustic mode that is diffracted from the surface of the sample to form a signal beam. The detector detects an acoustic mode to generate a signal beam, and the signal beam is analyzed to determine an acoustic frequency and amplitude, a modulation depth, or an attenuation constant. These properties are further analyzed to determine at least two properties of the sample (eg, the thickness of the two layers). |
| priorityDate | 1999-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.