| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069302aee0d7eee291cd1e0ffa662781 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1047 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2002-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c81f0366b47a0b76d93106d226bfaf11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4545a9d8bd812ccdb617da36c63306c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d5e566f50b80e10e9bbd6bc906c8367 |
| publicationDate |
2003-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003347291-A |
| titleOfInvention |
Method of forming inorganic porous membrane |
| abstract |
(57) [Problem] To provide a method for forming an inorganic porous film having pores of a uniform size and good mechanical properties. SOLUTION: A step of applying an inorganic material composition obtained by mixing a silicon oxide precursor containing at least one hydrolyzable silane compound and a porosifying agent to a solvent on a support to form a coating film; Drying the coating, contacting the dried coating with a supercritical fluid to remove the porogen, and firing the coating after the porogen is removed. And characterized in that: |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7498076-B2 |
| priorityDate |
2002-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |