| abstract |
PROBLEM TO BE SOLVED: To provide a method for producing a laminate having high adhesion to a substrate, high gas barrier properties and capable of forming a uniform layer. I do. SOLUTION: The present invention has, as a raw material for forming a self-assembled monolayer on a substrate, at least one adsorbing group for adsorbing the self-assembled monolayer on the substrate, and Using a self-assembled monolayer-forming substance having at least one alignment group to orient monomolecularly to form a self-assembled monolayer on the surface of the base material, the self-assembled monolayer is formed by a CVD method. Forming a self-assembled monolayer, removing an alignment group from the formed self-assembled monolayer, and forming a vacuum on the self-assembled monolayer from which the alignment group has been removed. The above object is achieved by providing a method for manufacturing a laminated body, comprising: a silicon oxide film forming step of forming a silicon oxide film using a film method. |