| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d7023cfc8bc8918905643211eedf7cec |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-148 |
| filingDate |
2002-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_942f5602884bbef63ea4a20fb5cc771f |
| publicationDate |
2003-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003332555-A |
| titleOfInvention |
Solid-state imaging device and manufacturing method thereof |
| abstract |
A solid-state imaging device having a high electrical withstand voltage between charge transfer electrodes is provided. A plurality of charge transfer electrodes formed on an insulating film 2 on the surface of a semiconductor substrate 1 are provided. Polycrystalline silicon film 4 having a gentle slope at the edge a, 4b and titanium silicide film 5S covering the periphery thereof And formed on the insulating film 2 at a predetermined interval. An insulating film 6 is formed on the charge transfer electrodes including the region between the charge transfer electrodes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4705791-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10261066-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10876159-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9506894-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9535033-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9644236-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10557167-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9194838-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10438811-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015028886-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006253478-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105593673-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10202644-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10466228-B2 |
| priorityDate |
2002-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |