http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003329641-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-416 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate | 2002-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8709f840a9c7b2146097055ae553c47f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31cb0ce508150510c362e51fc7c97d46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fe64e7a60b2a280fb94dda224ea2ac8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8ef04aa459d48a5aa15d30776e20a79 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3387edc38bf842859bca8b3c2156e9c0 |
| publicationDate | 2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003329641-A |
| titleOfInvention | Gas sensor and method of manufacturing the same |
| abstract | [PROBLEMS] To provide a gas sensor capable of suppressing heat radiation from a substrate, efficiently heating a gas detection unit, and using a power supply such as a battery with low power consumption. I do. SOLUTION: An n-type (1 10) plane single crystal silicon substrate 1, a heater 2 formed on the silicon substrate 1, and the silicon substrate below the heater 2 are removed by anisotropic etching. Diaphragm 7 formed by An insulating film 1a formed on the heater 2, a solid electrolyte 3 formed on the insulating film 1a, and a pair of electrodes 4 and 5 formed on the solid electrolyte 3. Since the heat radiation from the substrate 1 is suppressed and the gas detection unit is efficiently heated, the power consumption is low and a power source such as a battery can be used. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007096043-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101264933-B1 |
| priorityDate | 2002-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.