| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2002-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92b7e808958147b5d966629d4d142126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_877ef9023d3e6ea84b12450f9727c344 |
| publicationDate |
2003-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003322970-A |
| titleOfInvention |
Positive resist composition and pattern forming method using the same |
| abstract |
(57) [Problem] To provide a chemically amplified positive resist composition excellent in reduction of line edge roughness, resolution and cross-sectional shape of a resist pattern. (A) a compound capable of generating an acid upon irradiation with radiation; (B) (b-1) 40 to 80 mol% of a unit having an alkali-soluble group; (b-2) at least one acid dissociable or 1 to 50 mol% of a unit having an acid non-dissociable alkali-insoluble group, (b-3) alkali-insoluble unit of 0 to 4 A positive resist comprising a resin comprising a copolymer comprising 0 mol% and (b-4) a unit having an acid-dissociable group and containing 0 to 40 mol% of a unit different from (b-2). Composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005080474-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100801047-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7250246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1557720-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8741538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010181729-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7807328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006126433-A1 |
| priorityDate |
2002-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |