http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003322962-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2002-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fa01dd042e4435f4e9e89f0e3f9ff69 |
| publicationDate | 2003-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003322962-A |
| titleOfInvention | Radiation-sensitive resin composition |
| abstract | [Problem] A radiation-sensitive resin having high transparency to radiation, good adhesion to a substrate and excellent pattern hem shape, excellent pattern shape, wide exposure margin, and excellent sensitivity and resolution. Providing a composition. (A) An alkali-insoluble or alkali-insoluble resin which becomes alkali-soluble by the action of an acid, Provided is a radiation-sensitive resin composition comprising (B) a radiation-sensitive acid generator and (C) a specific dicarboxylic acid ester. |
| priorityDate | 2002-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 436.