http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003320606-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32c182780ae8fd1eabf081eb5ef98479 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-06 |
| filingDate | 2002-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_335e2d75cd4879b27c968e4fc09ee9a1 |
| publicationDate | 2003-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003320606-A |
| titleOfInvention | Protective film transfer sheet for photomask |
| abstract | PROBLEM TO BE SOLVED: To provide a protective film transfer sheet for a photomask capable of transferring a protective film capable of easily removing a part of the transferred protective film together with foreign matter after being transferred to a photomask. provide. A protective film transfer sheet provided with a protective film on a peelable support, wherein the protective film is transferred to a photomask image surface when the protective film is transferred to the photomask image surface. When a non-adhered portion occurs, the non-adhered portion of the protective film can be partially removed from the transferred protective film. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015174405-A |
| priorityDate | 2002-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.