| titleOfInvention |
Film pattern forming method, film pattern forming apparatus, conductive film wiring, semiconductor chip mounting structure, semiconductor device, light emitting device, electro-optical device, electronic equipment, and non-contact card medium |
| abstract |
PROBLEM TO BE SOLVED: To provide a film pattern forming method and a film pattern forming apparatus capable of forming a highly accurate film pattern in a simple process, a conductive film wiring, a semiconductor chip mounting structure, and a semiconductor device. , Light-emitting devices, electro-optical devices, electronic equipment, And a contactless card medium. A method for forming a film pattern according to the present invention forms a film pattern by discharging droplets made of a liquid material containing a film forming component to a predetermined film forming region on a substrate by a droplet discharging method. Forming a plurality of film patterns at adjacent positions by discharging a plurality of droplets that do not mix with each other. |