http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003317301-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be92719b856db86c092cc233e9512ca2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q80-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-22 |
| filingDate | 2002-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da083a2b9dea706edf372e0d4b5c7e70 |
| publicationDate | 2003-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003317301-A |
| titleOfInvention | Method of forming flat probe and flat probe |
| abstract | (57) [Problem] To realize a method of forming a flat probe capable of arbitrarily adjusting the shape (angle, height, opening at the tip) of a plurality of minute openings, and generate highly efficient near-field light. To provide a planar probe. A method of forming a flat probe having a plurality of rows of micro apertures for generating near-field light in the vicinity of the micro apertures to perform recording / reproduction on an optical recording medium is provided. A step of forming a pillar portion made of a translucent material thereon (S11), an embedding material which is etched around the pillar portion with the same etching solution or etching gas as that of the pillar portion material and has a higher etching rate than the material of the pillar portion (S12), and a step (S13) of etching the pillar portion and the embedding material by isotropic etching. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8073028-B2 |
| priorityDate | 2002-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.