http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003313083-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cfa11ef6f0c5577b4612b415ff30253 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B37-00 |
| filingDate | 2002-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50b0a84ea91e8ef8cf0bffcc0542128f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc0db112cfb3d9d247d46615fbcbfaf8 |
| publicationDate | 2003-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003313083-A |
| titleOfInvention | Bonded body of yttrium compound and bonding method thereof |
| abstract | (57) [Problem] To provide a yttrium-based compound such as a yttria sintered body or a YAG sintered body using an alumina raw material powder or a small amount of a rare earth oxide other than yttria with an alumina raw material powder. In addition to increasing the joint strength of joined bodies such as yttria sintered bodies and YAG sintered bodies, which are yttrium-based compounds, and reducing the effects of thermal stress and mechanical stress at the joints, plasma An object of the present invention is to obtain a joining member such as a yttria sintered body or a YAG sintered body in which plasma resistance of a joint portion of an alumina sintered body used in an apparatus is significantly improved. Kind Code: A1 Abstract: A joined body of a yttria sintered body, wherein a joined portion is a yttrium aluminum garnet (YA) A bonded body of a yttria sintered body, which is formed of a bonding layer containing G) as a main component. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114502520-A |
| priorityDate | 2002-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.