| abstract |
(57) [Problem] To manufacture each ferroelectric film such as PZT, BST, SBT, PLZT, etc. without deteriorating the quality. Provided are a vaporization supply method and a vaporization supply device for vaporizing a VD raw material and supplying a high-purity mixed vaporized gas to a semiconductor manufacturing apparatus. SOLUTION: Combined CVD raw materials which react with each other at a vaporization temperature or a temperature near the vaporization temperature are vaporized by separate vaporizers, and then a vaporized gas containing these combinations is mixed and further filtered by a filter to obtain a semiconductor. It is configured to supply to the manufacturing equipment. |