| abstract |
PROBLEM TO BE SOLVED: To provide a chemical concentration sensor capable of quickly and quantitatively measuring a large number of samples without replacing a sensor with a single measurement system, and a method of manufacturing the chemical concentration sensor. A and the two-dimensional chemical concentrations image sensor S L formed on the back side of one sheet of semiconductor substrate 2, so as to the sensitive part 2a of the two-dimensional chemical concentrations image sensor S L and the bottom surface, the same substrate 2 , A plurality of recesses 3 formed from the front side, a comparison electrode 4 disposed so as to face the inner surface of each recess 3, and a sensitive film 20 deposited on the bottom surface of the recesses 3. , And the chemical concentration of the sample to be measured contained in each of the recesses 3 can be individually measured. |