http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003277922-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bd0cdbc5c67cf4957ed83c89140748e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2002-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4de4e28de5db51c39df9ea5bd9ffbb07 |
| publicationDate | 2003-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003277922-A |
| titleOfInvention | Diamond-like hard carbon film and antireflection film |
| abstract | PROBLEM TO BE SOLVED: To provide a diamond-like hard carbon film having excellent water repellency and extremely good adhesion to an oxide film, a target capable of producing the diamond-like hard carbon film, and excellent water repellency. A diamond-like hard carbon film having extremely good adhesion to a metal oxide film; and an antireflection film having the diamond-like hard carbon film as a protective film. A transparent substrate, an antireflection film formed on the substrate, and a protective film formed on the antireflection film. The protective film is made of aluminum, magnesium, A diamond-like hard carbon film containing at least one selected from the group consisting of yttrium, gadolinium, cerium and calcium and fluorine. The protective film is manufactured by a sputtering method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012025632-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106746721-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005156807-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015024638-A |
| priorityDate | 2002-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.