| abstract |
(57) [Problem] To stably detect a surface shape with high sensitivity in a highly reliable state, for example, without being destroyed by static electricity generated at the time of sensing. SOLUTION: Ti / TiN is formed on a passivation film 109 including a through hole 109a by a sputtering method. Is formed. Next, a resist pattern 111 having a lattice shape in a plan view such that the sensor electrode 107 is arranged at the center of the mass is formed so as to extend over the region on the connection electrode film 108. After that, resist pattern 1 Using the mask 11 as a mask, the metal film 110 is selectively etched away by a dry etching method such as reactive ion etching. |