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filingDate 2002-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3fac4facd27ab3c7796b0971e9f6157
publicationDate 2003-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003266909-A
titleOfInvention Pattern formation method
abstract (57) [Problem] To provide a pattern forming method with good pattern reproducibility and no background stain. SOLUTION: In a state where a pattern forming plate 3 provided with openings 2 in a formed pattern is laminated on the surface of a base material 1, ink 4 is pushed into the openings of the pattern forming plate with a doctor blade 5 or the like, and the ink is The ink is cured by irradiating it with ionizing radiation such as an electron beam from the substrate side while being pushed into the opening. Thereafter, the pattern forming plate is separated from the substrate, and a pattern is formed on the surface of the substrate using a cured product of the ink. In the pattern forming plate, all or any of the layers in the thickness direction may be formed of a metal or the like as an ionizing radiation shielding layer.
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