| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-581 |
| filingDate |
2002-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 |
| publicationDate |
2003-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003243494-A |
| titleOfInvention |
Ceramic substrate |
| abstract |
(57) [Problem] To provide a ceramic substrate which is excellent as a substrate for a semiconductor manufacturing / inspection apparatus and which has excellent temperature rise / fall characteristics and withstand voltage at high temperature and has a small amount of warpage. SOLUTION: In the ceramic substrate in which a conductor is formed on the surface or inside of the ceramic substrate, the ceramic substrate has 15 × 1 pores having a pore diameter of 0.5 μm or more. A ceramic substrate having 0 11 / m 2 or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007186382-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012204827-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7446993-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4818922-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2006001373-A1 |
| priorityDate |
2002-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |