http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003234262-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
filingDate 2002-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833
publicationDate 2003-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2003234262-A
titleOfInvention Ceramic substrate for semiconductor manufacturing and inspection equipment
abstract [PROBLEMS] To provide a ceramic substrate capable of giving a practically uniform temperature distribution to a surface of a ceramic substrate on which a semiconductor wafer is processed. SOLUTION: The ceramic substrate having an electric conductor on the surface or inside of the ceramic substrate, wherein the ceramic substrate contains oxygen, the ceramic substrate has a disk shape, the diameter exceeds 250 mm, and the thickness of the ceramic substrate exceeds 250 mm. Is 25mm A ceramic substrate characterized by the following.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7288308-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9984912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019047132-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016534556-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9735037-B2
priorityDate 2000-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519470
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159434
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID100756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447663003
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID443162
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512363
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID442501
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419582280
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453010884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421182920
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450542361
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450570635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20548
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71435129
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419582283
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID100756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454511054
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17100
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23675242

Total number of triples: 49.