| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74973199515dbabd2310245aab03e282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2002-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_146d67a1a66fc491fc436983d8caa722
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa5476e5d6c33622b23c8abb7b1b8de7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e35a2146b57ec8ccd5a4e3ccb7ccb2f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fda1a43c0dd3141fbe5e57aa431fb17f |
| publicationDate |
2003-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003229379-A |
| titleOfInvention |
Metal film manufacturing method and metal film manufacturing apparatus |
| abstract |
(57) [Problem] To form a barrier metal film 23 in a very thin state while preventing diffusion of metal and maintaining adhesion to metal. SOLUTION: A surface treatment for removing N atoms in a surface TaN layer to relatively reduce the nitrogen content of the surface layer as compared with the inside of the base material of the barrier metal film 23 is performed, and the metal layer 23a is substantially formed on the surface layer. Is formed, and a substantial metal layer 23a and a metal nitride layer 23b are formed in a single layer thickness, and a barrier metal film 23 is formed in an extremely thin state while preventing metal diffusion and maintaining adhesion to the metal. And stabilize the metal wiring process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8409961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010010816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8043471-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015506097-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5335916-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007270309-A |
| priorityDate |
2002-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |