http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003223856-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2329-8635 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J31-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J29-87 |
| filingDate | 2002-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_daef71aa57fe55ade680be3741d672a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_079defe749c3413b92812eac6ac3e8e9 |
| publicationDate | 2003-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003223856-A |
| titleOfInvention | Electron beam device and spacer |
| abstract | (57) [Summary] [PROBLEMS] To suppress changes in the trajectory of electrons near a spacer due to long-time driving. When the maximum inclination angle θ of the uneven slope on the surface of the spacer substrate 1 is larger than 80 °, a part where the substrate angle is equal to or more than 80 ° is partially formed when the high-resistance film 2 is formed. Occurs, and as a result, the resistance of the high-resistance film 2 increases, Charges accumulate on the spacer substrate 1 with long-time driving. Therefore, by setting the maximum inclination angle θ of the slope of the spacer forming the unevenness to 80 ° or less, it is possible to prevent an increase in the resistance of the spacer, so that the change in the electron trajectory due to long-time driving can be prevented. Suppression becomes possible. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006216423-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101880787-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100746578-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101085422-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4678196-B2 |
| priorityDate | 2002-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.