http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003218103-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2b593eca079b33bdfa92b52bed14f59 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S428-901 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31721 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0346 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-00 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-00 |
| filingDate | 2002-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06184cea54bac6e46e48ad3172a0626f |
| publicationDate | 2003-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003218103-A |
| titleOfInvention | Method for forming polyimide film and production equipment thereof |
| abstract | PROBLEM TO BE SOLVED: To provide a high-density polyimide (HPI) film forming method capable of easily forming a film-like high-density polyimide on a substrate, and to provide a production facility therefor. SOLUTION: The production equipment includes a raw material supply device, a vacuum cavity, an energy supply device, a substrate jig, and a bake hardening device. A production facility that combines the above devices is C Using a monomer, polymer or copolymer having an ONH bond as a raw material, heat, electrons, light, radiation or ions are used as energy in a low-pressure environment to extract H in a CONH bond to form an unsaturated C = N bond. HP formed by extracting hydrogen from the unshared HPI film from the polymer having shared electron roots, and then rearranged and cured by heat or light. An I film is formed. |
| priorityDate | 2001-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.